MEMS (Micro Electro Mechanical Systems) is a technique of combining miniaturized electrical and mechanical elements with the help of microfabrication. It is also known as Micro Systems Technology in Europe and Micro Machines in Japan. The main components of MEMS are Micro Actuators, Micro Sensors, Micro Electronics, and Micro Structures.
A brief intro of MEMS technology is displayed in the below ppt:
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